Ion trap microchips form the core of many quantum technologies, in particular, the trapped ion quantum computers. We provide an overview of state-of-the-art microfabrication techniques, as well as various considerations which motivate the choice of materials and processes. Finally, we discuss current efforts to include advanced, on-chip features into next generation ion traps. Our paper has been published in Nature Review Physics, June 2020.
Manuscript: Engineering of Microfabricated Ion Traps and Integration of Advanced On-Chip Features